Electronicnā kinoea kūikawāhe lālā koʻikoʻi o nā kinoea kūikawā. Hoʻokomo lākou i nā loulou āpau o ka hana semiconductor a he mau mea waiwai nui ia no ka hana ʻana i nā ʻoihana uila e like me ka ultra-large-scale integrated circuits, flat panel display device, and solar cell.

I ka ʻenehana semiconductor, hoʻohana nui ʻia nā kinoea fluorine. I kēia manawa, i ka mākeke kinoea uila honua, ʻo nā kinoea uila e pili ana i ka fluorine ma kahi o 30% o ka huina. ʻO nā kinoea uila i loko o ka fluorine kahi mea nui o nā kinoea uila kūikawā ma ke kahua o nā mea ʻike uila. Hoʻohana nui ʻia lākou e like me nā mea hoʻomaʻemaʻe a me nā mea etching, a hiki ke hoʻohana ʻia e like me nā dopants, nā mea hana kiʻiʻoniʻoni, a pēlā aku.

Hoʻohana mau ʻia nā kinoea i loko o ka fluorine

Nitrogen trifluoride (NF3): He kinoea i hoʻohana ʻia no ka hoʻomaʻemaʻe ʻana a me ka wehe ʻana i nā waihona, hoʻohana mau ʻia no ka hoʻomaʻemaʻe ʻana i nā keʻena pane a me nā ʻili o nā mea hana.

Sulfur hexafluoride (SF6): He mea hoʻoheheʻe fluorinating i hoʻohana ʻia i nā kaʻina hana deposition oxide a ma ke ʻano he kinoea insulating no ka hoʻopiha ʻana i ka media insulating.

Hydrogen fluoride (HF): Hoʻohana ʻia no ka wehe ʻana i nā oxides mai ka ʻili silikona a ma ke ʻano he etchant no ke kālai kilika a me nā mea ʻē aʻe.

Nitrogen fluoride (NF): Hoʻohana ʻia e kiʻi i nā mea e like me ka silicon nitride (SiN) a me ka nitride aluminika (AlN).

Trifluoromethane (CHF3) a metetrafluoromethane (CF4): Hoʻohana ʻia e kiʻi i nā mea fluoride e like me ka fluoride silika a me ka fluoride aluminika.

Eia nō naʻe, loaʻa i nā kinoea i loko o ka fluorine kekahi mau pōʻino, e like me ka ʻawaʻawa, corrosiveness, a me ka flammability.

Kaʻawaʻawa

He mea ʻawaʻawa kekahi mau kinoea fluorine, e like me ka hydrogen fluoride (HF), nona ka mahu e hoʻonāukiuki loa i ka ʻili a me ka ʻōpū hanu a pōʻino i ke olakino kanaka.

Ka ʻinoʻino

Hiki ke hoʻopōʻino nui i ka ʻili, nā maka a me ka ʻōpū hanu.

Ka hikiwawe

ʻO kekahi mau fluoride he mea ʻā a hoʻopili ʻia me ka oxygen a i ʻole ka wai i ka lewa e hoʻokuʻu i ka wela nui a me nā kinoea ʻawaʻawa, hiki ke kumu i ke ahi a pahū paha.

Pilikia kiʻekiʻe

Pahū kekahi mau kinoea fluorinated ma lalo o ke kaomi kiʻekiʻe a pono e mālama kūikawā ke hoʻohana ʻia a mālama ʻia.

Ka hopena i ke kaiapuni

Loaʻa i nā kinoea i loko o ka Fluorine ke ola lewa kiʻekiʻe a me nā waiwai GWP, he hopena hoʻopōʻino i ka papa ozone lewa a hiki ke kumu i ka hoʻomehana honua a me ka pollution kaiapuni.

Ke hoʻomau nei ka hoʻohana ʻana o nā kinoea i nā ʻāina e kū mai ana e like me ka uila uila, e lawe mai ana i ka nui o nā koi hou no nā kinoea ʻenehana. Ma muli o ka nui o ka mana hana hou o nā mea uila nui e like me nā semiconductor a me nā paneli hōʻike ma ka ʻāina nui o Kina i nā makahiki e hiki mai ana, a me ka koi ikaika no ka hoʻokomo ʻana i nā mea kemika uila, e hoʻokomo ka ʻoihana uila uila. he ulu kiʻekiʻe.