Hoʻokomo ʻia ʻo Tungsten hexafluoride (WF6) ma ka ʻili o ka wafer ma o ke kaʻina CVD, hoʻopiha i nā auwaha hoʻohui metala, a hana i ka pilina metala ma waena o nā papa.
E kamaʻilio mua kākou no ka plasma. ʻO Plasma kahi ʻano mea i haku ʻia me nā electrons manuahi a me nā ion i kau ʻia. Aia ia ma ke ao holoʻokoʻa a manaʻo pinepine ʻia ʻo ia ka ʻehā o ke kūlana o ka mea. Ua kapa ʻia ʻo ia ka mokuʻāina plasma, i kapa ʻia ʻo "Plasma". Loaʻa i ka plasma ka conductivity uila kiʻekiʻe a he hopena hoʻohui ikaika me ka pā electromagnetic. He kinoea ionized hapa ia, i haku ʻia me nā electrons, nā ion, nā radical manuahi, nā ʻāpana kū ʻole, a me nā photon. ʻO ka plasma ponoʻī he hui kūʻokoʻa uila i loaʻa nā mea kino a me nā mea hana kemika.
ʻO ka wehewehe pololei ma lalo o ka hana o ka ikehu kiʻekiʻe, e lanakila ka mole i ka ikaika van der Waals, ka ikaika paʻa kemika a me ka ikaika Coulomb, a hōʻike i kahi ʻano o ka uila kūʻokoʻa holoʻokoʻa. I ka manawa like, ʻo ka ikaika kiʻekiʻe i hāʻawi ʻia e waho e lanakila ai i nā mana ʻekolu i luna. ʻO ka hana, nā electrons a me nā ion e hōʻike i kahi mokuʻāina manuahi, hiki ke hoʻohana ʻia ma lalo o ka modulation o kahi māla magnetic, e like me ke kaʻina hana semiconductor etching, kaʻina CVD, PVD a me ke kaʻina IMP.
He aha ka ikehu kiʻekiʻe? Ma ke kumumanaʻo, hiki ke hoʻohana ʻia ka wela kiʻekiʻe a me ka RF kiʻekiʻe. ʻO ka ʻōlelo maʻamau, ʻaneʻane hiki ʻole ke loaʻa ka wela kiʻekiʻe. He kiʻekiʻe loa kēia koi wela a kokoke paha i ka mahana o ka lā. ʻAʻole hiki ke hoʻokō i ke kaʻina hana. No laila, hoʻohana pinepine ka ʻoihana i ka RF kiʻekiʻe e hoʻokō ai. Hiki i ka Plasma RF ke kiʻekiʻe e like me 13MHz+.
Hoʻopili ʻia ʻo Tungsten hexafluoride ma lalo o ka hana o kahi māla uila, a laila waiho ʻia ka mahu e kahi māla magnetic. Ua like nā ʻātoma W me nā hulu kuisa hoʻoilo a hāʻule i ka lepo ma lalo o ka hana a ka umekaumaha. Me ka mālie, waiho ʻia nā ʻātoma W i loko o nā lua, a hoʻopiha piha ʻia i loko o nā lua e hana i nā pilina metala. Ma waho aʻe o ka waiho ʻana i nā ʻātoma W i loko o nā lua, e waiho pū ʻia lākou ma ka ʻili o ka Wafer? ʻAe, maopopo. Ma ka ʻōlelo maʻamau, hiki iā ʻoe ke hoʻohana i ke kaʻina W-CMP, ʻo ia ka mea a mākou i kapa ai i ke kaʻina hana wili mīkini e wehe. Ua like ia me ka hoʻohana ʻana i kahi pulumu e kahili i ka papahele ma hope o ka hau nui. Holoi ʻia ka hau ma ka honua, akā mau ka hau i loko o ka lua ma ka honua. I lalo, like like.
Ka manawa hoʻouna: Dec-24-2021
