I ke kaʻina hana hana o nā hale hana wafer semiconductor me nā kaʻina hana holomua, kokoke i 50 mau ʻano kinoea like ʻole e pono ai. Ma ke ʻano laulā, ua māhele ʻia nā kinoea i nā kinoea nui a menā kinoea kūikawā.

Ka hoʻohana ʻana i nā kinoea i nā ʻoihana microelectronics a me semiconductor Ua hoʻokani mau ka hoʻohana ʻana i nā kinoea i kahi hana koʻikoʻi i nā kaʻina hana semiconductor, ʻoi aku ka hoʻohana nui ʻia o nā kaʻina hana semiconductor i nā ʻoihana like ʻole. Mai ULSI, TFT-LCD a i ka ʻoihana micro-electromechanical (MEMS) o kēia manawa, hoʻohana ʻia nā kaʻina hana semiconductor ma ke ʻano he kaʻina hana hana huahana, me ka etching maloʻo, ka oxidation, ka ion implantation, ka waiho ʻana o ka ʻili lahilahi, a pēlā aku.

Eia kekahi laʻana, ʻike ka poʻe he nui ua hana ʻia nā ʻāpana i ke one, akā ke nānā nei i ke kaʻina holoʻokoʻa o ka hana ʻana i nā ʻāpana, pono nā mea hou aku, e like me ka photoresist, ka wai polishing, ka mea target, ke kinoea kūikawā, a me nā mea ʻē aʻe he mea pono ʻole. Pono pū ka ʻōpala hope i nā substrates, nā interposers, nā kiʻikuhi kēpau, nā mea hoʻopaʻa, a me nā mea ʻē aʻe o nā mea like ʻole. ʻO nā kinoea kūikawā uila ka lua o ka mea nui loa i nā kumukūʻai hana semiconductor ma hope o nā wafers silicon, ukali ʻia e nā masks a me nā photoresists.

He mana koʻikoʻi ko ka maʻemaʻe o ke kinoea i ka hana o nā ʻāpana a me ka hua o ka huahana, a pili ka palekana o ka lako kinoea i ke olakino o nā limahana a me ka palekana o ka hana o ka hale hana. No ke aha i loaʻa ai ka hopena nui o ka maʻemaʻe o ke kinoea i ka laina hana a me nā limahana? ʻAʻole kēia he hoʻonui, akā ua hoʻoholo ʻia e nā ʻano weliweli o ke kinoea ponoʻī.

Ka hoʻokaʻawale ʻana o nā kinoea maʻamau i ka ʻoihana semiconductor

Kinoea Maʻamau

Ua kapa ʻia hoʻi ke kinoea maʻamau he kinoea nui: pili ia i ke kinoea ʻoihana me kahi koi maʻemaʻe ma lalo o 5N a me kahi nui o ka hana a me ke kūʻai aku. Hiki ke hoʻokaʻawale ʻia i ke kinoea hoʻokaʻawale ea a me ke kinoea synthetic e like me nā ʻano hoʻomākaukau like ʻole. Hydrogen (H2), nitrogen (N2), oxygen (O2), argon (A2), etc.;

Kinoea Kūikawā

ʻO ke kinoea kūikawā e pili ana i ke kinoea ʻoihana i hoʻohana ʻia ma nā kahua kikoʻī a he mau koi kūikawā no ka maʻemaʻe, nā ʻano like ʻole, a me nā waiwai. ʻO ka mea nuiSiH4, PH3, B2H6, A8H3,HCL, CF4,NH3, POCL3, SIH2CL2, SIHCL3,NH3, BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6… a pēlā aku.

Nā ʻano kinoea kūikawā

Nā ʻano kinoea kūikawā: ʻinoʻino, ʻawahia, hiki ke lapalapa, kākoʻo i ke ahi, inert, a pēlā aku.
Ua hoʻokaʻawale ʻia nā kinoea semiconductor i hoʻohana nui ʻia penei:
(i) ʻAi ʻino/ʻawahia:HClʻO BF3, WF6, HBr, SiH2Cl2, NH3, PH3, Cl2BCl3…
(ii) Hiki ke lapalapa: H2、CH4、SiH4、PH3、AsH3、SiH2Cl2,B2H6,CH2F2,CH3F,CO…
(iii) Hiki ke ʻā: O2,Cl2,N2O,NF3…
(iv) Inert: N2、CF4C2F6C4F8、SF6CO2Ne、KrʻO ia…

I ke kaʻina hana o ka hana ʻana i nā ʻāpana semiconductor, ma kahi o 50 mau ʻano kinoea kūikawā like ʻole (i kapa ʻia he mau kinoea kūikawā) i hoʻohana ʻia i ka oxidation, diffusion, deposition, etching, injection, photolithography a me nā kaʻina hana ʻē aʻe, a ʻoi aku ka nui o nā ʻanuʻu hana holoʻokoʻa ma mua o nā haneli. No ka laʻana, hoʻohana ʻia ʻo PH3 a me AsH3 ma ke ʻano he kumu phosphorus a me arsenic i ke kaʻina hana ion implantation, nā kinoea F-based CF4, CHF3, SF6 a me nā kinoea halogen CI2, BCI3, HBr i hoʻohana pinepine ʻia i ke kaʻina hana etching, SiH4, NH3, N2O i ke kaʻina hana kiʻiʻoniʻoni deposition, F2/Kr/Ne, Kr/Ne i ke kaʻina hana photolithography.

Mai nā ʻano i luna, hiki iā mākou ke hoʻomaopopo he nui nā kinoea semiconductor e hōʻino i ke kino o ke kanaka. ʻO kekahi o nā kinoea, e like me SiH4, he mau kinoea e hoʻā ana iā ia iho. Inā lākou e liki ana, e hana ikaika lākou me ka oxygen i ka lewa a hoʻomaka e puhi; a he mea ʻawahia loa ʻo AsH3. Hiki i kekahi liki iki ke hōʻeha i ke ola o kānaka, no laila he kiʻekiʻe loa nā koi no ka palekana o ka hoʻolālā ʻōnaehana hoʻomalu no ka hoʻohana ʻana i nā kinoea kūikawā.

Pono nā semiconductors i nā kinoea maʻemaʻe kiʻekiʻe e loaʻa nā "kekelē ʻekolu"

Maʻemaʻe kinoea

ʻO ka nui o ka lewa haumia i loko o ke kinoea e hōʻike pinepine ʻia ma ke ʻano he pakeneka o ka maʻemaʻe o ke kinoea, e like me 99.9999%. Ma ke ʻano laulā, hiki i ke koi maʻemaʻe no nā kinoea kūikawā uila ke hiki i ka 5N-6N, a ua hōʻike pū ʻia e ka lakio nui o ka nui o ka ʻike o ka lewa haumia ppm (ʻāpana no ka miliona), ppb (ʻāpana no ka piliona), a me ppt (ʻāpana no ka trillion). Loaʻa i ke kahua semiconductor uila nā koi kiʻekiʻe loa no ka maʻemaʻe a me ke kūpaʻa o ka maikaʻi o nā kinoea kūikawā, a ʻoi aku ka maʻemaʻe o nā kinoea kūikawā uila ma mua o 6N.

Maloʻo

ʻO ka nui o ka wai liʻiliʻi i loko o ke kinoea, a i ʻole ka pulu, i hōʻike pinepine ʻia ma ke kiko hau, e like me ke kiko hau lewa -70℃.

Ka maʻemaʻe

ʻO ka helu o nā ʻāpana haumia i loko o ke kinoea, nā ʻāpana me ka nui o ka ʻāpana o µm, ua hōʻike ʻia i ka nui o nā ʻāpana/M3. No ka ea i hoʻopaʻa ʻia, ua hōʻike pinepine ʻia i mg/m3 o nā koena paʻa hiki ʻole ke pale ʻia, nona ka ʻike aila.