I ke kaʻina hana o ka semiconductor wafer foundries me nā kaʻina hana holomua, kokoke i 50 mau ʻano kinoea e pono ai. Hoʻokaʻawale ʻia nā kinoea i nā kinoea nui anā kinoea kūikawā.

Ka hoʻohana ʻana i nā kinoea i loko o nā microelectronics a me nā ʻoihana semiconductor ʻO ka hoʻohana ʻana i nā kinoea ua hana nui i nā hana semiconductor, ʻoi aku ka nui o nā kaʻina semiconductor i nā ʻoihana like ʻole. Mai ULSI, TFT-LCD i ka ʻoihana micro-electromechanical (MEMS) o kēia manawa, hoʻohana ʻia nā kaʻina semiconductor e like me nā kaʻina hana huahana, me ka etching maloʻo, oxidation, implantation ion, thin film deposition, etc.

No ka laʻana, nui ka poʻe i ʻike ua hana ʻia nā chips i ke one, akā i ka nānā ʻana i ke kaʻina holoʻokoʻa o ka hana ʻana i ka chip, pono nā mea hou aʻe, e like me ka photoresist, polishing liquid, target material, special gas, etc. Pono pū ka ʻeke hope i nā substrates, interposers, nā papa alakaʻi, nā mea hoʻopili, a me nā mea like ʻole o nā mea like ʻole. ʻO nā kinoea kūikawā uila ka lua o nā mea nui loa i nā kumukūʻai hana semiconductor ma hope o nā wafer silika, a ukali ʻia e nā masks a me nā photoresists.

He hopena koʻikoʻi ka maʻemaʻe o ke kinoea i ka hana ʻana a me ka huahana huahana, a pili ka palekana o ka hāʻawi ʻana i ke kinoea i ke olakino o nā limahana a me ka palekana o ka hana ʻoihana. No ke aha he hopena nui ka maʻemaʻe o ke kinoea i ka laina kaʻina hana a me nā limahana? ʻAʻole kēia he hoʻonui, akā ua hoʻoholo ʻia e nā hiʻohiʻona weliweli o ke kinoea ponoʻī.

Hoʻokaʻawale i nā kinoea maʻamau i ka ʻoihana semiconductor

Kinea maʻamau

Ua kapa ʻia ke kinoea maʻamau i ke kinoea nui: pili ia i ke kinoea ʻenehana me kahi koi maʻemaʻe ma lalo o 5N a me ka nui o ka hana a me ke kūʻai aku. Hiki ke hoʻokaʻawale ʻia i ke kinoea hoʻokaʻawale ea a me ke kinoea synthetic e like me nā ʻano hoʻomākaukau like ʻole. Hydrogen (H2), nitrogen (N2), oxygen (O2), argon (A2), etc.;

kinoea kūikawā

ʻO ke kinoea kūikawā e pili ana i ke kinoea ʻenehana i hoʻohana ʻia ma nā kahua kikoʻī a loaʻa nā koi kūikawā no ka maʻemaʻe, nā ʻano like ʻole, a me nā waiwai. ʻO ka mea nuiSiH4, PH3, B2H6, A8H3,HCL, CF4,NH3, POCL3, SIH2CL2, SIHCL3,NH3, BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6… a pēlā aku.

Nā ʻano kinoea Spicial

Nā ʻano kinoea kūikawā: corrosive, toxic, flammable, combustion-supporting, inert, etc.
Hoʻokaʻawale ʻia nā kinoea semiconductor maʻamau e like me kēia:
(i) ʻAiʻino/ʻawaʻawa:HClBF3, WF6, HBr, SiH2Cl2, NH3, PH3, Cl2,BCl3…
(ii) Hiki ke ahi: H2 、CH4、SiH4、PH3、AsH3、SiH2Cl2,B2H6,CH2F2,CH3F,CO…
(iii) Hiki ke puhi: O2, Cl2, N2O, NF3…
(iv) Inert: N2,CF4、C2F6、C4F8、SF6、CO2、Ne、Kr、ʻO ia…

Ma ke kaʻina hana o ka semiconductor chip manufacturing, ma kahi o 50 mau ʻano kinoea kūikawā (i kapa ʻia ʻo nā kinoea kūikawā) i hoʻohana ʻia i ka oxidation, diffusion, deposition, etching, injection, photolithography a me nā kaʻina hana ʻē aʻe, a ʻoi aku ka nui o nā kaʻina hana ma mua o nā haneli. No ka laʻana, PH3 a me AsH3 ua hoʻohana 'ia e like me phosphorus a me arsenic kumu i loko o ka ion implantation kaʻina, F-ma muli kinoea CF4, CHF3, SF6 a me halogen kinoea CI2, BCI3, HBr ua maʻamau hoʻohana 'ia i loko o ka etching kaʻina hana, SiH4, NH3, N2O ma. ke kaʻina hana kiʻi ʻoniʻoni, F2/Kr/Ne, Kr/Ne i ke kaʻina hana photolithography.

Mai nā hiʻohiʻona i luna, hiki iā mākou ke hoʻomaopopo he nui nā kinoea semiconductor e pōʻino i ke kino kanaka. ʻO ka mea nui, ʻo kekahi o nā kinoea, e like me SiH4, e hoʻā ana iā ia iho. I ka wā e kahe ai lākou, e hana ikaika lākou me ka oxygen i ka lewa a hoʻomaka e wela; a he mea make loa ka AsH3. Hiki i kekahi leaka liʻiliʻi ke hōʻeha i ke ola o nā kānaka, no laila ke kiʻekiʻe loa nā koi no ka palekana o ka hoʻolālā ʻōnaehana hoʻokele no ka hoʻohana ʻana i nā kinoea kūikawā.

Pono nā semiconductor i nā kinoea maʻemaʻe kiʻekiʻe e loaʻa i "ʻekolu degere"

Maʻemaʻe kinoea

Hōʻike pinepine ʻia ka ʻike o ka lewa haumia i loko o ke kinoea ma ke ʻano he pakeneka o ka maʻemaʻe kinoea, e like me 99.9999%. Ma ka ʻōlelo maʻamau, hiki i ka 5N-6N ke koi maʻemaʻe no nā kinoea kūikawā uila, a ua hōʻike ʻia hoʻi e ka nui o ka nui o ka ʻike o ka lewa haumia ppm (ʻāpana o ka miliona), ppb (ʻāpana i ka piliona), a me ka ppt (ʻāpana per trillion). Loaʻa i ka māla semiconductor nā koi kiʻekiʻe loa no ka maʻemaʻe a me ka paʻa o ka maikaʻi o nā kinoea kūikawā, a ʻoi aku ka maʻemaʻe o nā kinoea kūikawā uila ma mua o 6N.

Ka maloʻo

Hōʻike pinepine ʻia ka maʻiʻo o ka wai i loko o ke kinoea, a i ʻole ka pulu, ma kahi o ka hau, e like me kahi hau hau -70 ℃.

Maemae

Hōʻike ʻia ka helu o nā mea haumia i loko o ke kinoea, nā ʻāpana me ka nui o ka µm, i ka nui o nā ʻāpana/M3. No ka ea paʻa, hōʻike maʻamau ia i ka mg/m3 o nā koena paʻa hiki ʻole ke pale ʻia, ʻo ia hoʻi ka ʻaila ʻaila.