Epitaxial (ulu ʻana)Ga Huihuis

I loko o ka ʻoihana semiconductor, ʻo ke kinoea i hoʻohana ʻia e ulu i hoʻokahi a ʻoi aku paha nā papa o nā mea ma o ka waiho ʻana o ka mahu kemika ma luna o kahi substrate i koho pono ʻia ua kapa ʻia ʻo ke kinoea epitaxial.

ʻO nā kinoea epitaxial silicon i hoʻohana pinepine ʻia e komo pū me ka dichlorosilane, silicon tetrachloride a mesilaneHoʻohana nui ʻia no ka waiho ʻana o ka silicon epitaxial, ka waiho ʻana o ka ʻili ʻokikene silicon, ka waiho ʻana o ka ʻili nitride silicon, ka waiho ʻana o ka ʻili silicon amorphous no nā cell solar a me nā photoreceptors ʻē aʻe, a pēlā aku. ʻO ka Epitaxy kahi hana e waiho ʻia ai kahi mea kristal hoʻokahi a ulu ʻia ma luna o ka ʻili o kahi substrate.

Ka Waiho ʻana o ka mahu kemika (CVD) Kinoea Hui Pū ʻia

ʻO CVD kahi ʻano hana o ke kau ʻana i kekahi mau mea a me nā hui ma o nā hopena kemika pae kinoea me ka hoʻohana ʻana i nā hui volatile, ʻo ia hoʻi, kahi ʻano hana ʻoniʻoni e hoʻohana ana i nā hopena kemika pae kinoea. Ma muli o ke ʻano o ke kiʻiʻoniʻoni i hana ʻia, ʻokoʻa nō hoʻi ke kinoea hoʻokaʻawale mahu kemika (CVD) i hoʻohana ʻia.

Hoʻohana ʻia ka lāʻau lapaʻauKinoea i hui pū ʻia

I ka hana ʻana o nā mea semiconductor a me nā kaapuni i hoʻohui ʻia, hoʻohui ʻia kekahi mau haumia i loko o nā mea semiconductor e hāʻawi i nā mea i ke ʻano conductivity e pono ai a me kahi resistivity e hana ai i nā resistors, PN junctions, buried layers, etc. ʻO ke kinoea i hoʻohana ʻia i ke kaʻina hana doping ua kapa ʻia ʻo doping gas.

ʻO ka mea nui e komo pū me ka arsine, phosphine, phosphorus trifluoride, phosphorus pentafluoride, arsenic trifluoride, arsenic pentafluoride,boron trifluoride, diborane, etc.

ʻO ka maʻamau, ua hui pū ʻia ke kumu doping me kahi kinoea lawe (e like me ka argon a me ka naikokene) i loko o kahi keʻena kumu. Ma hope o ke kāwili ʻana, ua hoʻokomo mau ʻia ke kahe kinoea i loko o ka umu hoʻolaha a hoʻopuni i ka wafer, e waiho ana i nā dopants ma luna o ka ʻili o ka wafer, a laila e hana me ka silicon e hana i nā metala doped e neʻe i loko o ka silicon.

Ke kālai ʻanaHoʻohuihui Kinoea

ʻO ke kālai ʻana, ʻo ia ke kālai ʻana i ka ʻili hana (e like me ka ʻili metala, ka ʻili silicon oxide, a pēlā aku) ma luna o ke substrate me ka ʻole o ka uhi ʻana i ka photoresist, me ka mālama ʻana i ka ʻāpana me ka uhi ʻana i ka photoresist, i mea e loaʻa ai ke ʻano kiʻi e pono ai ma luna o ka substrate.

ʻO nā ʻano hana kālai ʻana e komo pū me ke kālai kemika pulu a me ke kālai kemika maloʻo. ʻO ke kinoea i hoʻohana ʻia i ke kālai kemika maloʻo ua kapa ʻia ʻo ia he kinoea kālai.

ʻO ke kinoea eli he kinoea fluoride (halide) maʻamau, e like mekalapona tetrafluoride, naikokene trifluoride, trifluoromethane, hexafluoroethane, perfluoropropane, a pēlā aku.