ʻO ka boron trichloride (BCl3)He hui inorganic i hoʻohana pinepine ʻia i ke kaʻina hana etching maloʻo a me ka hoʻokaʻawale ʻana o ka mahu kemika (CVD) i ka hana semiconductor. He kinoea kala ʻole ia me kahi ʻala ʻawaʻawa ikaika i ka mahana o ka lumi a he mea maʻalahi i ka ea pulu no ka mea hydrolyzes ia e hana i ka waikawa hydrochloric a me ka waikawa boric.

Nā noi o Boron Trichloride

I loko o ka ʻoihana semiconductor,ʻO ka boron trichlorideHoʻohana nui ʻia no ke kālai maloʻo ʻana o ka alumini a ma ke ʻano he dopant e hana i nā ʻāpana ʻano P ma nā wafers silicon. Hiki ke hoʻohana ʻia no ke kālai ʻana i nā mea e like me GaAs, Si, AlN, a ma ke ʻano he kumu boron i kekahi mau noi kikoʻī. Eia kekahi, hoʻohana nui ʻia ʻo Boron trichloride i ka hana metala, ka ʻoihana aniani, ka loiloi kemika a me ka noiʻi hale hana.

Ka palekana o Boron Trichloride

ʻO ka boron trichloridehe ʻawahia a he mea ʻawahia a hiki ke hōʻeha nui i nā maka a me ka ʻili. Hoʻoheheʻe ia i ka ea pulu e hoʻokuʻu i ke kinoea hydrogen chloride ʻawahia. No laila, pono e hana ʻia nā hana palekana kūpono i ka wā e lawelawe aiʻO ka boron trichloride, me ke komo ʻana i nā lole pale, nā goggles a me nā lako pale hanu, a me ka hana ʻana i loko o kahi wahi ea maikaʻi ai.