Boron trichloride (BCl3)he pūhui anorganic i hoʻohana mau ʻia i nā kaʻina hana etching maloʻo a me ka hoʻoheheʻe ʻana i ka mahu (CVD) i ka hana semiconductor. He kinoea waihoʻoluʻu ʻole me kahi ʻala ʻala ikaika ma ka lumi wela a paʻakikī i ka ea haʻahaʻa no ka mea hydrolyzes e hana i ka waika hydrochloric a me ka waika boric.

Nā noi o Boron Trichloride

I ka ʻoihana semiconductor,Boron trichlorideHoʻohana nui ʻia no ka etching maloʻo o ka alumini a ma ke ʻano he dopant e hana i nā ʻāpana P-type ma nā wafer silika. Hiki ke hoʻohana ʻia no ke kālai ʻana i nā mea e like me GaAs, Si, AlN, a ma ke ʻano he kumu boron i kekahi mau noi kikoʻī. Eia kekahi, hoʻohana nui ʻia ʻo Boron trichloride i ka hana metala, ka ʻoihana aniani, ka loiloi kemika a me ka noiʻi noiʻi.

Palekana o Boron Trichloride

Boron trichloridehe mea ʻino a ʻawaʻawa a hiki ke hōʻeha nui i ka maka a me ka ʻili. Hydrolyze ia i loko o ka ea haʻahaʻa e hoʻokuʻu i ke kinoea hydrogen chloride. No laila, pono e hana i nā hana palekana kūpono i ka wā e lawelawe aiBoron trichloride, me ke komo ʻana i nā lole pale, nā maka aniani a me nā lako pale hanu, a me ka hana ʻana i loko o kahi kaiapuni maikaʻi.